Silicidation process at the NiMo/Si interface in magnetron-sputtered nano-multilayer systems depending the layer thickness and annealing temperature

Applied Surface Science 2026

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Authors: E.O. Filatova, A.V. Solomonov, D.V. Danilov, S.S. Sakhonenkov

DOI: 10.1016/j.apsusc.2026.165957

Cited by: 1

References: 67

Fields of Study & Subjects

Semiconductor materials and interfaces Intermetallics and Advanced Alloy Properties Copper Interconnects and Reliability

References 67