Optimizing a novel green slurry by multifunctional pH regulators for ultra-smooth β-Ga2O3 (1 0 0) substrates via chemical mechanical polishing: experimental analysis, theoretical calculation and mechanistic insight

Applied Surface Science 2026

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Authors: Jiawei Wu, Baoguo Zhang

DOI: 10.1016/j.apsusc.2026.165965

Cited by: 3

References: 45

Fields of Study & Subjects

Ga2O3 and related materials Neonatal and Maternal Infections Peptidase Inhibition and Analysis

References 45