Evolution of ultrasmooth Si surface under scanning Ar ion beam etching with contamination

Applied Surface Science 2026

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Authors: Rong Wang, Qiushi Huang, Pengfeng Sheng, Li Jiang, Yixiao Ma, J. Yu, Igor V. Kozhevnikov, Shuai Yan, Siyi Huang, Shengyou Wen, Zhong Zhang, Zhanshan Wang
DOI: 10.1016/j.apsusc.2026.165968
Cited by: 2
References: 41

Fields of Study & Subjects

Ion-surface interactions and analysis Optical Coatings and Gratings X-ray Spectroscopy and Fluorescence Analysis

Publication details

Journal / source
Applied Surface Science
Publisher
Elsevier BV
Volume
727
Pages
165968–165968
Publication date
17 January 2026
Language
EN