Indirect Synthesis of Carbon-Free Perovskite SrTiO3 Thin Films via SrF2 and TiO2 ALD for DRAM Capacitors

Applied Surface Science 2026

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Authors: Jaejun Lee, Jaejun Lee, Sangyeon Jeong, Kyunghun Lyu, Taehyun Kim, Chanwoo Park, Bo Keun Park, Teak-Mo Chung, Woongkyu Lee

DOI: 10.1016/j.apsusc.2026.165987

Cited by: 1

References: 35

Fields of Study & Subjects

Semiconductor materials and devices Ferroelectric and Piezoelectric Materials Ferroelectric and Negative Capacitance Devices

References 35