A novel thick-film pressure sensor based on polymer-derived ceramic SiCN/C operating up to 400 °C

Applied Surface Science 2026

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Authors: Haoyang Ni, Lantian Tang, Xianwei Qian, Mengxue Chen, Shiye Ouyang, Yuchen Wu, Lingyun Wang

DOI: 10.1016/j.apsusc.2026.165999

Cited by: 2

References: 54

Fields of Study & Subjects

Electrical and Thermal Properties of Materials Advanced Sensor Technologies Research Advanced Sensor and Energy Harvesting Materials

References 54