Identification and quantification of ferroelectric phases in HfZrOx thin films using the precession electron diffraction technique

Applied Surface Science 2026

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Authors: Pradyumna Kumar Parida, Olivier Richard, Dae Seon Kwon, Gourab De, Mihaela Ioana Popovici, Paola Favia, Attilio Belmonte, Eva Grieten

DOI: 10.1016/j.apsusc.2026.166241

Cited by: 0

References: 35

Fields of Study & Subjects

Ferroelectric and Negative Capacitance Devices Semiconductor materials and devices Ferroelectric and Piezoelectric Materials

References 35