Amorphous Hafnium-Aluminum Oxide and IGZO by Spray Pyrolysis for Low Power Thin Film Transistor Electronics
Fields of Study & Subjects
Thin-Film Transistor Technologies
Silicon Carbide Semiconductor Technologies
Semiconductor materials and devices
Publication details
- Journal / source
- Applied Surface Science
- Publisher
- Elsevier BV
- Volume
- 730
- Pages
- 166327–166327
- Publication date
- 15 February 2026
- Language
- EN