Molecular dynamics simulation of mechanical properties for silicon nitride deposited by PECVD method

Applied Surface Science 2026

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Authors: Boqing Tian, Majiaqi Wu, Shihe Li, Zhengrong Guo, Lianqiao Yang

DOI: 10.1016/j.apsusc.2026.166339

Cited by: 1

References: 45

Fields of Study & Subjects

Metal and Thin Film Mechanics Copper Interconnects and Reliability Advanced Surface Polishing Techniques

References 45