Formation mechanism of oxygen-rich interfaces in SiCN Fusion bonding induced by synergistic plasma activation

Applied Surface Science 2026 Open access

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Authors: Liu Chang, Gangli Yang, Zhiyu Ma, Tianze Zheng, Long Cheng, Keke Tong, Hongjia Zhu, Liyi Li

DOI: 10.1016/j.apsusc.2026.166455

Cited by: 0

References: 23

Fields of Study & Subjects

3D IC and TSV technologies Semiconductor materials and devices Silicon Carbide Semiconductor Technologies

References 23