Role of a precursor in Sub-4 nm In2O3 semiconductor films in atomic layer deposition

Applied Surface Science 2026 Open access

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Authors: Joo-Hyeon Lee, Ae Rim Choi, Byung-Ha Kwak, Dohee Kim, Seung Wook Ryu, Il‐Kwon Oh

DOI: 10.1016/j.apsusc.2026.166461

Cited by: 0

References: 28

Fields of Study & Subjects

Semiconductor materials and devices Thin-Film Transistor Technologies Advancements in Semiconductor Devices and Circuit Design

References 28