Aromatic organic-tin hybrid films as electron beam resists

Applied Surface Science 2026

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Authors: Jacqueline Lewis, Long Viet Than, Stacey F. Bent
DOI: 10.1016/j.apsusc.2026.166488
Cited by: 2
References: 52

Fields of Study & Subjects

Advancements in Photolithography Techniques Copper Interconnects and Reliability Electron and X-Ray Spectroscopy Techniques

Publication details

Journal / source
Applied Surface Science
Publisher
Elsevier BV
Volume
732
Pages
166488–166488
Publication date
1 March 2026
Language
EN