Mechanistic insights into high-efficiency polishing of AlN single crystals: synergistic effects of abrasives and oxidants

Applied Surface Science 2026

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Authors: Shitong Liu, Baoguo Zhang, Wenhao Xian, Yijun Wang, Sihui Qin, Yang Liu

DOI: 10.1016/j.apsusc.2026.166584

Cited by: 3

References: 34

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced ceramic materials synthesis Advanced machining processes and optimization

References 34