Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pellicles

Applied Surface Science 2026

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Authors: Young Woo Kang, Haneul Kim, Inseo Lee, Taeho Lee, In‐Sung Park, Jinho Ahn
DOI: 10.1016/j.apsusc.2026.166963
Cited by: 1
References: 28

Fields of Study & Subjects

Carbon Nanotubes in Composites Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics

Publication details

Journal / source
Applied Surface Science
Publisher
Elsevier BV
Volume
738
Pages
166963–166963
Publication date
20 April 2026
Language
EN