Tuning optical and electronic properties of oxygenated TiN thin films via laser fluence in pulsed laser deposition

Applied Surface Science 2026

View at publisher
Authors: Yimin Lu, Yaoyu Hu, Yujun Liu, Chunlai Yang
DOI: 10.1016/j.apsusc.2026.167090
Cited by: 1
References: 33

Fields of Study & Subjects

Metal and Thin Film Mechanics Copper Interconnects and Reliability Semiconductor materials and devices

Publication details

Journal / source
Applied Surface Science
Publisher
Elsevier BV
Volume
741
Pages
167090–167090
Publication date
1 May 2026
Language
EN