Theoretical and experimental study on middle-spatial frequency errors control in high-speed reciprocating scanning laser polishing of fused silica

Applied Surface Science 2026

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Authors: Min Tang, Honglin MA, Yong Jiang, Liang Yang, Yan Gao, XiangYu Wang, Jie Yang, Lei Zhu, Qi Zhang

DOI: 10.1016/j.apsusc.2026.167148

Cited by: 1

References: 22

Fields of Study & Subjects

Advanced Surface Polishing Techniques Laser Material Processing Techniques Optical Systems and Laser Technology

References 22