Evaluation of surface preparation methods for epitaxial growth on miscut (100) β-Ga2O3 substrates

Applied Surface Science 2026

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Authors: Robert M. Lavelle, Connor M. Beakes, Eric A. Welp, Samuel R. Hallacher, Luke A. M. Lyle, Benjamin L. Dutton, Scott W. Pistner, Mason B. Cleff, Sergei P. Stepanoff, Drew T. Haven, David B. Joyce, Joan M. Redwing
+1 more David W. Snyder
DOI: 10.1016/j.apsusc.2026.167611
Cited by: 1
References: 48

Fields of Study & Subjects

Ga2O3 and related materials GaN-based semiconductor devices and materials Copper-based nanomaterials and applications

Publication details

Journal / source
Applied Surface Science
Publisher
Elsevier BV
Volume
747
Pages
167611–167611
Publication date
20 June 2026
Language
EN