Time-of-flight secondary ion mass spectrometry and X-ray photoelectron spectroscopy investigation of B4C barrier thickness effects at the Mo-on-Si interface in Mo/Si multilayers

Applied Surface Science 2026

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Authors: Longxun Cao, Du Wenyun, Hongxuan Song, Zhenqi Lu, Wenjie Xu, 邵建达 Jianda Shao, Meiping Zhu

DOI: 10.1016/j.apsusc.2026.167616

Cited by: 1

References: 56

Fields of Study & Subjects

Boron and Carbon Nanomaterials Research MXene and MAX Phase Materials Advanced ceramic materials synthesis

References 56