Design and fabrication of colloidal-lithography-based micro/nano hierarchical structures for broadband antireflection on silicon

Applied Surface Science 2026

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Authors: Wei‐Chun Chen, Guo-Chen Nieh, Yen-En Juan, Yao-Nien Tsai, Yeeu-Chang Lee

DOI: 10.1016/j.apsusc.2026.167720

Cited by: 1

References: 25

Fields of Study & Subjects

Optical Coatings and Gratings Nanofabrication and Lithography Techniques Near-Field Optical Microscopy

References 25