Data-driven discovery of novel additives for superconformal cobalt electrodeposition in 3D interconnects
Fields of Study & Subjects
Electrodeposition and Electroless Coatings
Nanoporous metals and alloys
Electrocatalysts for Energy Conversion
Publication details
- Journal / source
- Chemical Engineering Journal
- Publisher
- Elsevier BV
- Volume
- 529
- Pages
- 172903–172903
- Publication date
- 12 January 2026
- Language
- EN