Data-driven discovery of novel additives for superconformal cobalt electrodeposition in 3D interconnects

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Authors: Yuhang Jiang, Guoxiang Cui, Sibo Zhao, Xi Ren, Shenghong Ju, Yunwen Wu
Cited by: 1
References: 52

Fields of Study & Subjects

Electrodeposition and Electroless Coatings Nanoporous metals and alloys Electrocatalysts for Energy Conversion

Publication details

Journal / source
Chemical Engineering Journal
Publisher
Elsevier BV
Volume
529
Pages
172903–172903
Publication date
12 January 2026
Language
EN