Interplay of cross-reading, pressure and co-evaporation speed on triple-source FA-based perovskite films and devices

Hybrid organic-inorganic perovskites (PVKs) offer exceptional optoelectronic performance, yet reproducible and scalable co-evaporation remains challenging. This study examines the interplay of factors affecting compositional control during three-source PVK deposition. We identify chamber pressure, precursor cross-contamination, and flux instability – especially from organic salts such as formamidinium iodide (FAI) – as major sources of variability. A critical influence is the occurrence of cross-reading , where omnidirectional evaporation of FAI contributes to the reading on the quartz crystal microbalance (QCM) sensors monitoring the inorganic precursors like caesium bromide (CsBr) and lead iodide (PbI 2 ) even though shielding is present. This effect, strongly dependent on FAI load, deposition rate, and QCM sensor position, erroneously inflates measured fluxes, leading to inaccurate rate control and unintentional compositional drift. Maintaining A-, B- and X-site stoichiometry therefore requires dynamic adjustment of precursor rates, particularly at higher deposition speeds where mean free path limitations come into play. We demonstrate the successful deposition of perovskite layers at a deposition speed of 27.8 nm min −1 as the practical ceiling for the investigated Cs x FA 1-x Pb(I 1-x Br x ) 3 composition within our experimental framework. These findings highlight the delicate balance between deposition speed, precursor stability, and film quality, underscoring the need for improved delivery systems - such as continuous precursor feedthrough, multiple organic sources, alternative vapor transport or flash evaporation methods – to achieve reproducible, fast and large-scale fabrication of high-performance PVK films.