A flexible capacitive sensor featuring spherical-like microstructures with ultrafast response and an ultralow detection limit for miniature fast steering mirror applications

Chemical Engineering Journal 2026

View at publisher

Authors: Yifan Ding, Yiqian Shao, Hang Xu, Zenghui Xiong, Jin Luo, Yao Mao, Ping-an Yang, Zhiwei Huang

DOI: 10.1016/j.cej.2026.174815

Cited by: 4

References: 45

Fields of Study & Subjects

Advanced Sensor and Energy Harvesting Materials Advanced MEMS and NEMS Technologies Transition Metal Oxide Nanomaterials

References 45