Mechanistic study of fluid-mediated ultrasonic assisted delamination of laser-modified single-crystal SiC

Chemical Engineering and Processing - Process Intensification 2026

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Authors: Yan He, Linzheng Ye, Boyang Lv, Xijing Zhu, Shida Chuai
DOI: 10.1016/j.cep.2026.110732
Cited by: 0
References: 40

Fields of Study & Subjects

Ultrasound and Cavitation Phenomena Laser Material Processing Techniques Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
Chemical Engineering and Processing - Process Intensification
Volume
222
Pages
110732–110732
Publication date
11 February 2026
Language
EN