Effect of surface morphology on the quality factor of fused silica micro hemispherical resonator

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Authors: Haoning Zheng, Yalong Wang, Yao Wang, Zhouwei He, Xiang Xi, Xiaoyan Sun, YouWang HU, Ji’an Duan
Cited by: 1
References: 46

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Photonic and Optical Devices Mechanical and Optical Resonators

Publication details

Journal / source
Ceramics International
Publisher
Elsevier BV
Volume
52
Issue
7
Pages
8260–8268
Publication date
6 February 2026
Language
EN