Effect of surface morphology on the quality factor of fused silica micro hemispherical resonator
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Photonic and Optical Devices
Mechanical and Optical Resonators
Publication details
- Journal / source
- Ceramics International
- Publisher
- Elsevier BV
- Volume
- 52
- Issue
- 7
- Pages
- 8260–8268
- Publication date
- 6 February 2026
- Language
- EN