A vitrified bond diamond grinding wheel prepared by DLP and grinding performance on single crystal silicon wafer

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Authors: Jun-yong Zeng, Feng-lin Zhang, Pu Gao, Wei Yang, Xiao-yi Pan
Cited by: 2
References: 40

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Tunneling and Rock Mechanics

Publication details

Journal / source
Ceramics International
Publisher
Elsevier BV
Volume
52
Issue
8
Pages
9776–9788
Publication date
17 January 2026
Language
EN