Direct Si doping into Ga2O3 films from quartz substrate by low temperature heat treatment

Ceramics International 2026

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Authors: Wei Ren, Yixuan Li, Weitao Fan, Wei-Li Wang, Yanhan Yang, Si-Yu Chen, Bo-Shi Lei, Zi-Ying Lu, Jia-Hao Chang

DOI: 10.1016/j.ceramint.2026.01.162

Cited by: 0

References: 28

Fields of Study & Subjects

Ga2O3 and related materials Semiconductor materials and devices Thin-Film Transistor Technologies

References 28