Optimizing silicon-based metal-oxide-semiconductor capacitors via forming gas-oxygen-forming gas annealing of thulium oxide passivation layers

Ceramics International 2026

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Authors: Junchen Deng, Hock Jin Quah

DOI: 10.1016/j.ceramint.2026.01.242

Cited by: 1

References: 60

Fields of Study & Subjects

Semiconductor materials and devices Semiconductor materials and interfaces Silicon and Solar Cell Technologies

References 60