Atomic distributions at the interface of multilayer SiO2-PTFE thin films deposited via an alternate sputtering process

Ceramics International 2026

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Authors: Se Young Ko, Yong Gyu Choi

DOI: 10.1016/j.ceramint.2026.04.044

Cited by: 1

References: 68

Fields of Study & Subjects

Ion-surface interactions and analysis Semiconductor materials and devices Copper Interconnects and Reliability

References 68