Silica glasses for AI computing chips: Achieving low dielectric constant and high mechanical strength via rapid light shaping and low temperature sintering

Ceramics International 2026

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Authors: Shibo Zhao, 徐娅娇, Hongyun Zeng, Sultan Suleymanov, Chenxiang Ma, Hexing Yuan, Xuefeng Tang, Yiyang Zhu, Minghui Zhang

DOI: 10.1016/j.ceramint.2026.04.209

Cited by: 1

References: 30

Fields of Study & Subjects

Semiconductor materials and devices Silicon Nanostructures and Photoluminescence Thin-Film Transistor Technologies

References 30