Plasma-induced optimization of electron trapping for high-k charge trap memories: Mechanistic insights and modeling approaches

Ceramics International 2026

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Authors: Chan Hee Lee, So Won Kim, Hee Chul Lee

DOI: 10.1016/j.ceramint.2026.04.229

Cited by: 1

References: 53

Fields of Study & Subjects

Semiconductor materials and devices Plasma Diagnostics and Applications Silicon and Solar Cell Technologies

References 53