Automated extraction of physical parameters from depth profiling data using the MRI model
Fields of Study & Subjects
Ion-surface interactions and analysis
Surface Roughness and Optical Measurements
Metal and Thin Film Mechanics
Publication details
- Journal / source
- Chemometrics and Intelligent Laboratory Systems
- Publisher
- Elsevier BV
- Volume
- 272
- Pages
- 105675–105675
- Publication date
- 18 February 2026
- Language
- EN