Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test

Computers & Industrial Engineering 2026

View at publisher
Authors: Lerroy Ashwin Amal Roy, James Sze Boon Beh, Chai Kiat Yeo, Shyamsunder Regunathan
DOI: 10.1016/j.cie.2026.111872
Cited by: 0
References: 40

Fields of Study & Subjects

Machine Fault Diagnosis Techniques Fault Detection and Control Systems Reliability and Maintenance Optimization

Publication details

Journal / source
Computers & Industrial Engineering
Volume
214
Pages
111872–111872
Publication date
29 January 2026
Language
EN