Task-based feasibility evaluation of an LLM-enhanced digital twin for semiconductor manufacturing analytics

Computers & Industrial Engineering 2026

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Authors: Seongho Cho, Gihan Lee, Sangchul Park

DOI: 10.1016/j.cie.2026.112281

Cited by: 1

References: 31

Fields of Study & Subjects

Digital Transformation in Industry Flexible and Reconfigurable Manufacturing Systems Machine Learning in Materials Science

References 31