Innovations in advanced processes and systems for semiconductor manufacturing
Abstract
The manufacturing of integrated circuits (ICs) is an enabler of technological innovation and is critical to the resilience of industry and national security. Four levels of excellence are necessary as the foundation for semiconductor manufacturing: ecosystem; fab profitability; IC design for manufacturing and research & development; culture and customer trust. In this paper, the culture, semiconductor manufacturing processes, innovations of equipment, removal processes, in-line metrology for process control, and data analytics are discussed. Future topics, including advanced packaging, sustainability, fab operation optimization, and in-space semiconductor manufacturing, as well as workforce policy and ethics, are elaborated.
Fields of Study & Subjects
Experience-Based Knowledge Management
Physical Unclonable Functions (PUFs) and Hardware Security
Space Technology and Applications
Publication details
- Journal / source
- CIRP Annals
- Publisher
- Elsevier BV
- Volume
- 75
- Issue
- 2
- Pages
- 1027–1053
- Publication date
- 1 January 2026
- Language
- EN