Study on planarization mechanism of multi-interfaces in soft-hard combined polishing plate for single-crystal SiC

CIRP journal of manufacturing science and technology 2026

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Authors: Chen Lin, Jiabin Lu, Jiajian Sun, Naiyin Huang, Da Hu

DOI: 10.1016/j.cirpj.2026.06.010

Cited by: 1

References: 28

Fields of Study & Subjects

Advanced Surface Polishing Techniques Copper Interconnects and Reliability Advanced ceramic materials synthesis

References 28