Dry development in lithography: Molecular design and chemical strategies

Advances in Colloid and Interface Science 2026

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Authors: Kangsik Lee, Juchan Chung, Hyo Jae Yoon

DOI: 10.1016/j.cis.2026.103809

Cited by: 3

References: 50

Fields of Study & Subjects

Advancements in Photolithography Techniques Nanofabrication and Lithography Techniques Copper Interconnects and Reliability

References 50