The milder synthesis and highly-efficient purification of tetrakis(dimethylamino)titanium with ultrahigh-purity for wafer-scale TiO2 film under atomic layer deposition

Chinese Journal of Chemical Engineering 2026

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Authors: Wenjian Xu, Zhen Zhang, Yi Lin, Jingjing Chen, Peipei He, Haohong Li, Huidong Zheng

DOI: 10.1016/j.cjche.2025.11.028

Cited by: 0

References: 52

Fields of Study & Subjects

Semiconductor materials and devices Advanced Materials and Semiconductor Technologies Copper Interconnects and Reliability

References 52