Enhancing the performance of a nonlinear mode-localized MEMS accelerometer based on electrostatically coupled resonators

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Authors: Ming Lyu, Zhikun Zha, Yanmin Zhang, Shengjie Zhou, Yuheng Quan, Feixuan Wei, Jian Zhao, Najib Kacem
Cited by: 1
References: 38

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Geophysics and Sensor Technology

Publication details

Journal / source
Communications in Nonlinear Science and Numerical Simulation
Publisher
Elsevier BV
Volume
163
Pages
110532–110532
Publication date
9 July 2026
Language
EN