Additive manufacturing of electrostatic chucks with tunable ceramic-polymer dielectrics: A combined experimental and FEA approach

Composites Communications 2026

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Authors: Munseong Kim, Jongwoo Lim, Jongwoo Lim, Jae-Hyuk Park, Sukeun Yoon, Jihoon Kim

DOI: 10.1016/j.coco.2026.102727

Cited by: 2

References: 36

Fields of Study & Subjects

Electrohydrodynamics and Fluid Dynamics Aerosol Filtration and Electrostatic Precipitation Power Transformer Diagnostics and Insulation

References 36