Environmentally friendly post-CMP cleaning of ceria nanoparticles with different structures and surface activities

Colloids and Surfaces A Physicochemical and Engineering Aspects 2026

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Authors: Uiseok Hwang, Sunyoung Kim, Jakyeong Koo, Soochan Kim, Jae‐Do Nam, Jaeuk Sung
DOI: 10.1016/j.colsurfa.2026.139570
Cited by: 0
References: 21

Fields of Study & Subjects

Advanced Surface Polishing Techniques Erosion and Abrasive Machining Laser Material Processing Techniques

Publication details

Journal / source
Colloids and Surfaces A Physicochemical and Engineering Aspects
Volume
736
Pages
139570–139570
Publication date
13 January 2026
Language
EN