Simulating silicon thermal oxidation with the hybrid MD + tfMC approach

Computational Materials Science 2026

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Authors: Przemysław Szatan, Maria Sywanycz, Szymon Winczewski

DOI: 10.1016/j.commatsci.2026.114598

Cited by: 0

References: 41

Fields of Study & Subjects

Semiconductor materials and devices Advanced Physical and Chemical Molecular Interactions Theoretical and Computational Physics

References 41