Research on defect detection performance of silicon carbide wafer surface based on ESN-YOLOv8 algorithm

Computational Materials Science 2026

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Authors: Chen Yang, Siyuan Yang, Yan He, Lin Fan, Xingjun Gao, Meiling Tang, Jingting Sun

DOI: 10.1016/j.commatsci.2026.114656

Cited by: 22

References: 44

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Surface Roughness and Optical Measurements Advanced Data and IoT Technologies

References 44