Ultraviolet catalysis assisted chemical mechanical polishing of cobalt: Mechanism of corrosion inhibition and atomic-level planarization

Corrosion Science 2026

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Authors: Lifei Zhang, Jialei Zhang, X Lu

DOI: 10.1016/j.corsci.2026.113638

Cited by: 3

References: 44

Fields of Study & Subjects

Advanced Surface Polishing Techniques Silicon and Solar Cell Technologies Copper Interconnects and Reliability

References 44