Self-aligned patterning process for high aspect-ratio nanostructuring in single-crystal diamond

Diamond and Related Materials 2026 Open access

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Authors: Ou Zhang, Fang Jiao, Gang‐Qin Liu, Sichen Mi, Feng Luo
DOI: 10.1016/j.diamond.2026.113339
Cited by: 0
References: 36

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Nanofabrication and Lithography Techniques Advanced MEMS and NEMS Technologies

Publication details

Journal / source
Diamond and Related Materials
Volume
163
Pages
113339–113339
Publication date
16 January 2026
Language
EN