Heteroepitaxial growth of (100) single-crystal diamond with reduced wafer bow via SiO₂ Nanospheres interlayer

Diamond and Related Materials 2026

View at publisher

Authors: Min Young Yoon, Taemyung Kwak, Joocheol Jeong, Seolyoung Oh, Yoonseok Nam, Geunho Yoo, Okhyun Nam

DOI: 10.1016/j.diamond.2026.113468

Cited by: 1

References: 36

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Advanced Surface Polishing Techniques Electronic and Structural Properties of Oxides

References 36