Research on single-crystal diamond surface polishing process and material removal mechanism based on inductively coupled plasma etching reactions

Diamond and Related Materials 2026

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Authors: Jiangjun Zhou, Jiahuan Wang, Xiaoqiang Chen, Xu Wang, Jinhu Wang, Zhuohao Dai, Julong Yuan

DOI: 10.1016/j.diamond.2026.113487

Cited by: 11

References: 31

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Nanofabrication and Lithography Techniques

References 31