Material removal behavior of SiC wafer studied by nano-scratching in aqueous medium

Diamond and Related Materials 2026

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Authors: Qiufa Luo, Xinkai Lv, Zhihao Cheng, Jing Lu, Congming Ke, Hui Huang, Yunyun Song

DOI: 10.1016/j.diamond.2026.113588

Cited by: 1

References: 35

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

References 35