Free-standing hybrid Zr/NGF filter for high-power EUV purification in EUV lithography

Diamond and Related Materials 2026

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Authors: Myeong Jin Jeong, Ki‐Bong Nam, Munja Kim, Dong‐Wook Shin, Ji‐Beom Yoo

DOI: 10.1016/j.diamond.2026.113661

Cited by: 1

References: 22

Fields of Study & Subjects

Advancements in Photolithography Techniques Surface and Thin Film Phenomena Electron and X-Ray Spectroscopy Techniques

References 22