Fabrication and characterization of a hydrogen-terminated diamond MOSFET with buried p+ type electrodes formed by ion implantation

Diamond and Related Materials 2026

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Authors: Sakura Uehara, Yuhei Seki, Yasushi Hoshino, Hitoshi Umezawa, Junichi H. Kaneko

DOI: 10.1016/j.diamond.2026.114054

Cited by: 1

References: 54

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Advancements in Semiconductor Devices and Circuit Design Semiconductor materials and devices

References 54