Process optimization for suppressing N-methylformamide hydrolysis and methylamine generation in stripper solution
Abstract
The semiconductor industry stripper solution contains N-methylformamide (NMF), which hydrolyzes to methylamine during distillation recovery, reducing NMF recovery and causing secondary pollution. This study investigated the effects of various conditions on NMF hydrolysis and its kinetics. The recovery process was optimized by adding a roots pump and forced circulation at the evaporator bottom. In engineering application, the operating pressure was reduced by 2.67–6.67 kPa, temperature by 10–30 °C, with fluctuations narrowed from
Fields of Study & Subjects
Process Optimization and Integration
Catalysis for Biomass Conversion
Polymer composites and self-healing
Publication details
- Journal / source
- Desalination and Water Treatment
- Publisher
- Elsevier BV
- Volume
- 326
- Pages
- 101799–101799
- Publication date
- 1 April 2026
- Language
- EN