Mechanistic insights into anodic oxidation and FA-ECMP of 4H-SiC in inorganic salt electrolytes

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Authors: Hao Guo, Shenglong Zhang, Xiaozhe Yang, Xu Yang, Xu Yang, Xu Yang, K. Yamamura, Zhuangde Jiang
Cited by: 1
References: 49

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

Publication details

Journal / source
Electrochimica Acta
Publisher
Elsevier BV
Volume
550
Pages
148133–148133
Publication date
5 January 2026
Language
EN